Work Package 3:
Large volume fabrication
Led by KIT
Participants:
Objectives:
- To investigate the roles of nanorobotics and automatic control in LIL-based 3D patterning
- To develop large volume 3D nanostructure fabrication process
Tasks:
Task 3.1 Synchronised scanning (led by MU)
R&I activities: (1) the optimal overlapping modelling, (2) synchronised scanning implementation
Training activities: developing knowledge and skills of 3D stitching through RI activities and seminars/workshops
Task 3.2 Laser interference scanning (led by CUST)
R&I activities: (1) simulating LIS process; (2) precise control for LIS process
Training activities: developing knowledge and skills of LIS through RI activities and seminars/workshops
Task 3.3 Integration and standardisation of VLILS, GALS, PPA, SC and LIS (led by BED and NU)
R&I activities: simulating the integrated process
Training activities: developing system design skills of LIS