Work Package 2:
Nanometrology and characterisation
Led by KIT
Participants:
Objectives:
- To develop 3D nano-structure measurement techniques
- To develop light energy distribution model
Tasks:
Task 2.1: 3D nanostructure modelling and measurement (led by UoW)
RI activities: (1) modelling 3D nanostructure with the focus on 3D nanostructure of graphene scaffold and 3D nanostructure of electrode, mainly based on the available modelling software tools, (2) developing the means of obtaining the information of distribution, accuracy, uniformity and contrast of the structures, which will be required as feedback to control 3D patterning processes
Training activities: through RI activities and seminars/workshops, developing research skills in metrology study and skills of using modelling tools and measurement equipment
Task 2.2: LIL Modelling laser interference energy distribution (led by DFM)
RI activities: (1) exploring theories of light energy distribution in LIL processes, (2) identifying the influencing factors to the energy distribution in practice, (3) LIL modelling based on (1) and (2)
Training activities: through RI activities and seminars/workshops (1) building up theoretical knowledge of light energy distribution, (2) developing skills of investigating influencing factors in practical settings, (3) developing modelling skills